crius_II_en_00, Edition 06/2010
66 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Reactor CRIUS II
3
Coil fixing The heater is mounted to the quadrant plates by means of clamps. See
Fig. 3-13, 66.
Fig. 3-13 Coil fixing
A Susceptor support
B Quadrant plates
CCoil clamp
Heater power supply
unit
The heater is fed by 10 power supplies.
Fig. 3-14 Heater power supply unit
A Power supply
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