crius_II_en_00, Edition 06/2010
174 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Gas system CRIUS II
6
3 Ensure that the manual valves (item J in Fig. 6-35, 173) supplied with
the bubbler are closed
4 Switch the system to N
2
5 Set the bubbler pressure controller to 2000 mbar and the source MFCs
to their maximum values
6 Switch off CONTROL in AIXACT
• The throttle valve is closed
7 Switch to maintenance mode
8 Open the 4/2-way MO source valve in AIXACT
9 Leave the MO source (4/2-way valve) lines open
10 Remove the plugs (where applicable) and connect the new bubbler
under these conditions.
• The pressure controller isolates the system from the outside while
N
2
purges the connection lines. This prevents the source lines from
being contaminated by external air.
11 Ensure that the bubbler inlet and outlet are not swapped
• They should be labeled
12 Connect a He leak tester to the MO leak test port on the MO vac line
and evacuate the pipe from the leak test port to the leak tester
13 Open the MO leak test port manual valve
14 Close the 4/2-way MO source valve in AIXACT
15 Open both quarter turn valves (item H in Fig. 6-35, 173) on the source
manifold to the MO vac line
16 Evacuate the MO vac line by opening the MO vac valve for one minute
(then close again)
17 Perform an He leak test to the newly connected bubbler
18 Close both quarter turn valves (item H in Fig. 6-35, 173) on the source
manifold to the MO vac line
19 Close the MO leak test port manual valve
20 Disconnect the leak tester and place the blind caps on the MO leak test
port
21 Open the MO vac valve in AIXACT
22 Open both quarter turn valves (item H in Fig. 6-35, 173) on the source
manifold to the MO vac line for one minute
• This will pump the lines to the source
23 Close both quarter turn valves on the source manifold to the MO vac line
and open the 4/2-way MO source valve. Wait until the source line is
filled again to 2000 mbar.
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