AIXTRON CRIUS II - Page 75

AIXTRON - Dokumentation CONFIDENTIAL 75
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Gas system
Fig. 3-23 Doping hydride source
Provided that all MFCs are in the control range, you can use the following for-
mula to calculate the process gas flow F
R
into the reactor:
F
1
= flow through the source MFC
F
2
= flow through the dilute MFC
F
3
= flow through the inject MFC
AAB
C
DE
FG
HI
P
AH
2
supply
B Hydride gas supply
C 3/2-way valve
D Source MFC
E Dilute MFC
F Inject MFC
G Pressure controller
H To hydride run/vent line
I To hydride vent line
F=Fx
R3
F
1
F+F
12