AIXTRON - Dokumentation CONFIDENTIAL 143
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Lockout/tagout (LOTO)
LOTO table
Tab. 6-12 LOTO table
Item Energy type Component Action
A Electric current Main switch at the system and at
the RF generator
Switch off the main switches,
lockout and tagout them
B Gases Lockable shut-off valves
between the gas interface of the
CRIUS II and the media supply
of the end user
Close lockable shut-off valves,
lockout and tagout them
C Pneumatic Shut-off valve at the pneumatic
maintenance unit
Close lockable shut-off valve,
lockout and tagout it
D Water Lockable shut-off valves
between the water connections
of the CRIUS II and the media
supply of the end user
Close lockable shut-off valves,
lockout and tagout them
E Heat Reactor Allow hot parts to cool down to
room temperature
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