AIXTRON - Dokumentation CONFIDENTIAL 145
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Information on elastomer seals
Fig. 6-3 Inspecting a seal
A Cuts and porous areas
B Enlargement, swelling
Cleaning 3 Pull the seal through a dry and clean cloth to remove coarse soiling
4 Pull the seal through a cloth moistened with isopropanol
Inserting 5 Insert the seal
6 Check the excess of the seal in the groove. See Fig. 6-4, 145.
• Seal thickness 5 mm: Excess = 0.8 mm
• Seal thickness 6 mm: Excess = 1.1 mm
Fig. 6-4 Excess of a seal in the groove
AExcess
NOTE:
Do not apply vacuum grease to seals used in the vacuum system or pro-
cess gas system of the CRIUS II!
To Next Page