AIXTRON - Dokumentation CONFIDENTIAL 129
5
crius_II_en_00, Edition 06/2010
System Manual Operation
CRIUS II Preparing for a process
7 Start the automatic pump/refill cycle of the lock chamber by means of
the control panel. This procedure makes sure that contamination cannot
enter the glove box via the lock chamber.
Loading substrates
into the reactor
8 Open the inner lock chamber door by means of the control panel
9 Press the [OPEN] button to open the reactor lid
• The reactor lid is only cleared for opening if the [OPEN] button is illu-
minated by green light
Fig. 5-31 [OPEN] and [CLOSE] buttons
10 Pull the drawer from the lock chamber into the glove box
Fig. 5-32 Pulling the drawer out of the lock chamber
11 Remove the substrates from the transport containers
12 Use the vacuum tweezers to put the substrates onto the susceptor
13 Push the drawer back into the lock chamber
14 Press the [CLOSE] button to close the reactor lid. See Fig. 5-31, 129.
• The reactor lid is only cleared for closing if the [CLOSE] button is illu-
minated by green light
NOTE:
The inner lock chamber door can also be opened by pressing the [Inner
Door] button at the control box inside of the glove box. See Chapter
5.2.4, 116.
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