AIXTRON CRIUS II - Page 172

crius_II_en_00, Edition 06/2010
172 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Gas system CRIUS II
6
5 Set the pressure controller of the bubbler (item C in Fig. 6-34,  171) to
2000 mbar and the MFCs of the bubbler to their maximum value
6 Set the inject MFC on the dopant sources to its minimum value
7 Switch off CONTROL in AIXACT
• The throttle valve is closed
8 Switch to maintenance mode
9 Open the MO vac valve in AIXACT for at least 10 minutes
10 Open both quarter turn manual valves (item H in Fig. 6-34,  171) on
the source manifold to the MO vac line for one minute
• This will pump the source lines external to the bubbler
11 Close the MO vac valve and open the 4/2-way MO source valve. Wait
until the source line is filled again to 2000 mbar.
12 Close the 4/2-way MO source valve and open the MO vac valve again
for one minute
13 Repeat the pump/purge cycle (steps 11, 12) at least eight times using
H
2
14 Switch the system to N
2
15 Repeat the pump/purge cycle at least two times with N
2
16 Close both quarter turn manual valves
17 Leave the 4/2-way MO source valve open
18 Change the container under these conditions by breaking the bubbler
line VCR connection
• The pressure controller isolates the system from the outside while
N
2
purges the connection lines. This prevents the source lines from
being contaminated by external air.