AIXTRON CRIUS II - Page 40

crius_II_en_00, Edition 06/2010
40 CONFIDENTIAL AIXTRON - Dokumentation
Safety System Manual
Lockout/tagout procedure CRIUS II
2
Releasing stored
energy
6 Release, restrain, or otherwise render safe all potential hazardous
stored or residual energy. Typical examples of stored energy are:
6.1 Heat. Heaters and adjacent components may still be hot. Allow
the components to cool down.
6.2 Pressurized gas. Pressurized gases may be stored in the related
gas lines. Use the pressure relief valve.
6.3 Pressurized liquid. May be stored in water lines and hydraulic
systems. Use the pressure relief valve.
6.4 Mechanical energy, stored in springs, flywheels, or similar parts.
Relief the energy as required.
Verifying 7 Verify the isolated and de-energized state of the component
NOTE:
If a possibility exists for re-accumulation of hazardous energy, regularly
verify during the maintenance or service task that such energy has not
reaccumulated to hazardous levels.