AIXTRON - Dokumentation CONFIDENTIAL 43
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Personal protective equipment (PPE)
Maintenance and higher
Tab. 2-2 Personal protective equipment (typical examples)
Safety goggles (unbreakable)
Fine dust mask (P2)
Cartridge respirator (half facepiece)
Filters for inorganic gases and vapors
Cartridge respirator (full facepiece)
Filters for inorganic gases and vapors
Protective boots
Personal protective equipment Typical examples
Lockout/tagout kit containing all the
required lockout devices and lockout tags
Personal protective equipment Typical examples
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