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crius_II_en_00, Edition 06/2010
System Manual Chapter overview
CRIUS II
AIXTRON - Dokumentation CONFIDENTIAL 3
Chapter overview
Use, data
Intended use. User qualifications. Technical data. 5
Safety
Regulations. Danger areas. Safety circuit. LOTO. 17
Description
Process technology. System overview. Components. 55
Installation
Transport. Assembly. Initial commissioning. 99
Operation
Operating elements. Switching on/off. Production. 109
Maintenance
Maintenance schedule. Maintenance work. 131
Storage, disposal
Deactivating. Storage. Disposal. 183
Appendix
Glossary. Tables and lists. Forms. 189
Index
Alphabetically sorted index. 193
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