AIXTRON CRIUS II - Page 78

crius_II_en_00, Edition 06/2010
78 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Gas system CRIUS II
3
Standard MO source
with double bubbler
One thermostat heat bath contains two MO bubblers.
Fig. 3-26 Standard MO source with double bubbler
ABA
G
C
P
EF
I
K
D
LL
HH
JJJJ
JJ
AH
2
supply
B To MO run/vent line
C Pressure controller
D Source MFC
E Push MFC
F Measuring device for gas concentrations
(optional)
G 4/2-way MO source valve
H Quarter turn manual valve
I MO vacuum (for changing the MO bubbler)
J Manual valve at the bubbler
K Thermostat heat bath
L MO bubbler