170
Cha
ter 7
Calculation
Anal
sis
and Out
ut of Ins
ection Results
Reference Data Symbol Checker
No.
Object
No.
Refer.
No.
Reference Data Output Multiple
value
(*1
01 0 Det. Count
1 Area
2 Grav. X 10-fold
3 Grav. Y 10-fold
4 Proj. X Axis 10-fold
5 Proj. Y Axis 10-fold
6 Perimeter length
7 Theta 10-fold
8 Proj. X Axis 10-fold
Feature
Extraction
FE 01 – 99
01 –
99
9 Proj. Y Axis 10-fold
01 0 Det. Count
1 Corr. 100-fold
2 X Coordinate 10-fold
3 Y Coordinate 10-fold
4 Angle 10-fold
5 Subtr. Area Min.
6 Subtr. Num.
7 Proj. X Axis 10-fold
Checker
Smart Matching SM 01 – 99
01 –
64
8 Proj. Y Axis 10-fold
1 Corr.
2 X Coordinate 10-fold
3 Y Coordinate 10-fold
4 Angle 10-fold
5 Proj. X Axis 10-fold
Contour
Matching
CM 01 – 99 ---
6 Proj. Y Axis 10-fold
0 Det. Count
1 Flaw Size
2 Flaw No.
3 X 10-fold
4 Y 10-fold
5
Proj. X Axis 10-fold
Flaw Detection FW 01 – 99 01 –
99
6
Proj. Y Axis 10-fold
Number of Scans
QS 00 --- 0 Number of Scans
1 OK Count
2 NG Count
3 OK Average
4 Disperse OK 100-fold
5 Maximum
6 Minimum
Previous Statistics Data
(*2
OQS 01 – 96 ---
7 Range
Numeric Calcu. CA 01 – 96 --- --- Num. Result Numeric
Calculat
ion
Previous Data of
Numeric Calcu
OCA 01 – 96 --- --- Previous Data of
Numeric Calcu.
1 Coeff.
*3
2 Base Dist.
Conversion Data CV 1 – 4 ---
3 Base Pixel