Agilent Technologies 5DX - Page 274

Index-4
5DX Series 3
Adjusting the Outer Barrier’s
Secondary Safety Interlock 3-23
Adjusting the Safety Interlocks on the
Inner Barrier 3-15
Inner Barrier Safety Interlocks 3-11
Outer Barrier’s Primary Safety
Interlock 3-13
Outer Barrier’s Secondary Safety
Interlock 3-13
Pin Block Screw Locations 3-17
Placement of Primary Gap Adjuster
3-21
Primary Safety Interlock 3-19
Controller 3-3
Diagnostic LEDs 3-4
Normal Operation LEDs 3-4
Service Switch 3-5
Watchdog Timer 3-6
Locations 3-7
Subsystem 3-1
Overview 3-2
Switch for the Inner Barrier Frame 3-9
Switch for the Outer Barrier Frame 3-9
Switch for the Side/Top Access Panels 3-8
Switch for the Sliding Access Panels 3-8
Switches 3-8
Wiring Diagram 3-10
Shutdown
Long Term 4-22
SMEMA Interface Standards 5-6
Communication Signals 5-8
Introduction 5-6
SMEAMA Connections through the
Digital I/O Assembly 5-11
Snap Margin 7-4
Subsystems 1-10
Imaging Subsystem 1-12
Panel Handling Subsystem 1-12
Pneumatics Subsystem 1-12
Safety Interlock Subsystem 1-11
Surface Map Subsystem 1-12
System Controller/Expansion Chassis
1-12
X-ray High Voltage Power Supply 1-11
Surface Map 7-5
Components
Laser 7-6
Laser Theory of Operation 7-8
Laser View Camera 7-9
Panel View Camera 7-10
Laser Adjustment 7-5
OFFSET (X&Y) 7-5
Overview 7-2
Subsystem 7-1
System Controller
Heirarchical Diagram 1-10
System Status Beacon 4-30, 10-7
T
Test Process Flow Chart 1-6
TRCMDPRO Window 4-22
U
User Interface 1-13
Operator Control 1-13
V
VacIon Pump Power Supply 4-17
W
Warnings 2-3
Wiring Diagrams 4-9