14.2 Measurement Range and Accuracy
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Guaranteed Accuracy Range
The guaranteed accuracy range is as follows. The guaranteed accuracy range varies with the sample’s
impedance.
Range Sample impedance
0.001 Hz to
99.999 Hz
100.00 Hz to
999.99 Hz
1.0000 kHz to
10.000 kHz
10.001 kHz to
100.00 kHz
100.01 kHz to
200.00 kHz
100 M 8 M to 200 M
0.101 V to 5 V
10 M 800 k to 10 M
0.501 V to 5 V
1 M 80 k to 1 M 0.05 V to 5 V 0.101 V to 5 V
100 k 8 k to 100 k 0.05 V to 5 V 0.101 V to 5 V
10 k 800 to 10 k
1 k 80 to 1 k 0.005 V to 5V
100 8 to 100
10 800 m to 10 0.05 V to 5 V
1 80 m to 1 0.101 V to 5 V
*2
100 m 10 m to 100 m 0.501 V to 5 V
*1
*1 The guaranteed accuracy range during DC bias operation is 1 V to 5 V.
*2 The guaranteed accuracy range during DC bias operation is 0. 501 V to 5 V.
Range Sample impedance
0.001 Hz to
99.999 Hz
100.00 Hz to
999.99 Hz
1.0000 kHz to
10.000 kHz
10.001 kHz to
100.00 kHz
100.01 kHz to
200.00 kHz
10 M 10 M to 100 M
0.101 V to 5 V
1 M 1 M to 10 M
0.501 V to 5 V
100 k 100 k to 1 M 0.05 V to 5 V 0.101 V to 5 V
10 k 10 k to 100 k 0.05 V to 5 V 0.101 V to 5 V
1 k 1 k to 10 k 0.005 V to 5V
The above voltages are the voltage settings equivalent to when V mode.
The maximum measurement signal level value in low Z high accuracy mode is 2.5 V.
• The above measurement specification was determined using a 1.5C-2 V coaxial cable
with an established cable length for the instrument.
Using a cable other than a 1.5C-2 V, or a cable that not an established length for the
instrument in question increases the chance of measurement inaccuracy. A large capac-
itance between the H terminal and grounding capacitance (GND) or the L terminal and
GND may result in measurement inaccuracy. Please set the GND to 10 pF or less.
• When measuring capacitors with an impedance of 100 k or greater with a measure-
ment frequency of 1 Hz or lower, the instrument may indicate UNDERFLOW, and you
may experience significant variation in measurement values. If UNDERFLOW is indi-
cated, you can lower the measurement range in order to measure the part. In this case,
measurement values should be used for reference purposes only as the accuracy speci-
fications may not be satisfied.