Chapter 1 Specications Check 1.2 Mechanical Specications
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1.2.4 Positioning Repeatability, Lost Motion
(Note 1)
[1] Pulse Motor Standard Specifications
Axis Positioning Repeatability [mm]
(Note 2)
Lost Motion [mm]
X ±0.02 0.1 or less
Y ±0.02 0.1 or less
Z ±0.02 0.1 or less
R ±0.015 [deg] 0.06deg or less
[2] Pulse Motor High Resolution Specifications
Axis Positioning Repeatability [mm]
(Note 2)
Lost Motion [mm]
X ±0.01 0.05 or less
Y ±0.01 0.05 or less
Z ±0.01 0.05 or less
R ±0.01 [deg] 0.06deg or less
[3] Servo Motor Low Lead Specifications
Positioning Repeatability [mm]
(Note 2)
Lost Motion [mm]
Axis
Battery-Less
Absolute Encoder
Absolute Encoder
Battery-Less
Absolute Encoder
Absolute Encoder
X ±0.005 0.025 or less 0.020 or less
Y ±0.005 0.025 or less 0.020 or less
Z ±0.005 0.020 or less
R ±0.015 [deg] ±0.010 [deg] 0.06deg or less 0.03deg or less
[4] Servo Motor High Lead Specifications
Positioning Repeatability [mm]
(Note 2)
Lost Motion [mm]
Axis
Battery-Less
Absolute Encoder
Absolute Encoder
Battery-Less
Absolute Encoder
Absolute Encoder
X ±0.005 0.040 or less 0.020 or less
Y ±0.005 0.040 or less 0.020 or less
Z ±0.005 0.020 or less
R ±0.015 [deg] ±0.010 [deg] 0.06deg or less 0.03deg or less
Note 1 This is an option already attached when it is shipped out from the factory. It does not include the
consideration of time-dependent change as it is used.
Note 2 It is applicable only when the temperature on the main body is in constant. It is not what
guarantees the absolute precision.