4-19
Agilent 7500 ICP-MS ChemStation Operator’s Manual
Tuning
Electrical Model of the Plasma and the Interface Region
In the plasma
The ionization efficiency of elements in the Ar plasma can be calculated using the
Saha-Egggert Equation given below:
a: Ionization efficiency
Ne: Electron density
m: Mass of an ion
V: Ionization potential of an element
k: Boltzman constant
T: Electron temperature
h: Plank constant
Z: Partition function
t
E
t
Matching
RF source
Torch
Sampling
Skimmer
Work Coil
Work coil potential
Cone
Cone
Sample In
Ion energy
Network
Plasma potential
a
1a–
-----------
2Ï€mkT()
3
2
---
Neh
--------------------------
2Z
Z
-------
e
V–
kT
-------
××=
+
3