Keysight E4980A - Guarding for Measurement of Low Capacitance Values

202 Keysight E4980A/AL Precision LCR Meter
Measurement Procedure and Examples
Measurement Contacts
7-
Guarding for Measurement of Low Capacitance Values
Use a guard plate to minimize measurement errors caused by stray
capacitance when measuring low capacitance values, such as low-capacitance
chip capacitors. Figure 7-14 shows an example of measurement contacts
using a guard plate in the four-terminal pair measurement configuration.
Figure 7-14 Example DUT Guard Plate Connection
㪼㪋㪐㪏㪇㪸㫌㪼㪈㪈㪈㪌
LCUR LPOT HPOT HCUR
4TP Test Leads Shield Conductor
of the Test Leads
DUT
GROUND
Connect here
Guard Plate
(Should not be Grounded)