Parameter
Address Name / seng range / [default seng] Info
0x5041:003 Max. posive
correcon
0.0000 ... [45.0000] ... 214748.3647
0x5041:004 Max. negave correcon
0.0000 ... [45.0000] ... 214748.3647
0x5041:005 Reference measuring system of correcon window
1 Corrected master posion
2 Actual tool posion
0x5041:006 Upper correcon posion
0.0000 ... [350.0000] ... 214748.3647
0x5041:007 Lower correcon posion
0.0000 ... [200.0000] ... 214748.3647
0x5042:002 Actual mark posion
•
R
ead only
0x5042:003 Actual mark error
•
R
ead only
0x5042:004 Actual limited mark error
•
Read only
0x5042:006 Corrected set posion
•
R
ead only
0x5042:007 Corrected set velocity
•
R
ead only
Conguring the "Sync and Correcon" TA
Mas
ter value correcon (register control)
Posion correcon
141