No. 99MBB122A
17-1
17 PRODUCT
SPECIFICATIONS
17.1 Detector
Detection method Differential inductance method
Measurement range 360 μm (-200 μm to +160 μm)
14400 μin (-8000 μm to +6400 μin)
Stylus material Diamond
Tip radius 5 μm (200 μin)/[2 μm (80 μin)]
Measuring force 4 mN (0.4 gf)/[0.75 mN (0.075gf)]
Radius of skid curvature 40 mm (1.575 in)
* [ ] indicates 0.75 mN detector (178-395, 178-387).
17.2 Drive
Detector drive range 21 mm (0.827 in)/[5.6 mm (0.221 in)]
Traversal speed Measurement : 0.25 mm/s, 0.5 mm/s, 0.75 mm/s
(0.01 in/s, 0.02 in/s, 0.03 in/s)
Return : 1 mm/s (0.04 in/s)
Detector retraction function Stylus UP/[No]
Bottom configuration: V-shaped trough
* [ ] indicates transverse tracing type.
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