18. Reference Information
No.99MBB122A
18-41
18.5.33 Vo (Free): Volume measure
From the lines that are obtained by selecting 2 points (point A and point B) on the BAC
(material-ratio profile)
*1
that differ in Rmr[c] value by 40%, obtain the line with the smallest
inclination. Set points C and D to to where the obtained line intersects with the lines for
Rmr[c] = 0 and Rmr[c] = 100, respectively. Rk is the difference along the vertical axis (slice
level) between point C and point D.
Set point H to the point on the BAC with the same slice level as point C, and then set point
I to the point were the BAC profile and the slice level at Rmr[c] = 0 intersect. Next, set
point J along Rmr[c] = 0, so that the area enclosed by line segment CH, line segment CI,
and curve HI and the area of triangle CHJ are the same. Rpk is the distance between point
C and point J. M1 is the Rmr[c] value at point H. A1 is the area of triangle CHJ.
In the same way, set point E to the point on the BAC with the same slice level as point D,
and then set point F to the point were the BAC profile and the slice level at Rmr[c] = 100
intersect. Next, set point G along Rmr[c] = 100, so that the area enclosed by line segment
DE, line segment DF, and curve EF and the area of triangle DEG are the same. Rvk is the
distance between point D and point G. Mr2 is the Rmr[c] value at point E. A2 is the area of
triangle DEG.
Vo is the area, S, of the space bounded on the bottom by the BAC (material-ratio profile)
and on the top by the slice line on the BAC where Rmr[c] is Mr2. The value of this
parameter is converted from the volume (mm
3
) of the concave portion below the slice level
to a volume per area (cm
2
) when viewed from the top of a work piece, when the evaluation
profile and slice level are assumed as a plane in a 3-dimensional space.
Volume Vo
*1: The horizontal axis of the BAC represents Rmr[c] values; the vertical axis represents
slice levels (m).
G
H
C
A
B
E
A2
A1
Rk
Rvk
Mr1
Mr2
40%
J
F
Rpk
I
DEPTH(µm)
Rvk
S
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