17. PRODUCT SPECIFICATIONS
No. 99MBB122A
17-3
17.3.3 Cutoff lengths/sampling lengths, number of sampling lengths, and
sampling interval
Cutoff length (λc)
*1
Sampling
length (ℓ)
λs Sampling
interval
Number of pieces of
data in a sampling
lengths
Number of
sampling
lengths
0.08 mm
(0.003in)
0.08 mm
(0.003 in)
2.5 μm
(100 μin)
0.5 μm
(19.69 μin)
160 1-10
0.25 mm
(0.01in)
0.25 mm
(0.01 in)
2.5 μm
(100 μin)
0.5 μm
(19.69 μin)
500 1-10
0.8 mm
(0.03 in)
0.8 mm
(0.03 in)
2.5 μm
(100 μin)
0.5 μm
(19.69 μin)
1600 1-8
2.5 mm
(0.1 in)
2.5 mm
(0.1 in)
8 μm
(320μin)
1.5 μm
(59.1 μin)
1666 1-5
*1: These cutoff lengths (λc) are applied when the R profile is specified.
17.3.4 Upper limit of motif lengths/evaluation lengths, number of sampling lengths,
and sampling interval
Upper limit of
motif length (A)
[mm (in)]
Evaluation length (L)
[mm (in)]
Cutoff length (λs)
[μm (μin)]
Sampling pitch
Δx [μm (μin)]
0.02
(0.001)
0.3 ≤ L ≤ 0.64
(0.0118 ≤ L ≤ 0.0252)
2.5
(100)
0.5
(19.685)
0.1
(0.004)
0.65 ≤ L ≤ 3.2
(0.0256 ≤ L ≤ 0.126)
2.5
(100)
0.5
(19.685)
0.5
(0.02)
3.3 ≤ L ≤ 16
(0.130 ≤ L ≤ 0.630)
8
(320)
1.5
(59.055)