Source maintenance 7-15
2. Turn the chamber assembly 45 degrees counterclockwise.
3. Lift the chamber assembly off the bayonet connector.
Disassembling the chamber assembly
To remove the ion exit plate
1. Remove the 4 screws securing the ion exit plate to the ion block.
Warning: The chamber assembly components can be contaminated
with toxic materials. Wear nitrile gloves at all times while handling
the components.