Source maintenance 7-21
Cleaning ion burn from the inner source chamber assembly
components
To clean the ion exit plate
1. Using 12-
mµ lapping paper, rub all the ion exit plate surfaces, including
the ion exit gap edges, until they are free of visible ion burn.
2. Using 9-
mµ lapping paper, polish all the ion exit plate surfaces,
including the ion exit gap edges.
To clean the filament contacts
Using 9-
mµ lapping paper, clean all the surfaces of the filament contact
blocks.
To clean the trap
1. Using 12-
mµ lapping paper, rub the trap edge and end surfaces until
they are free of visible ion burn.
2. Using 9-
mµ lapping paper, polish the trap edges and end surfaces.
To clean the trap contact
Using 9-
mµ lapping paper, clean all the trap contact surfaces.
Warning: The chamber assembly components can be contaminated
with toxic materials. Wear nitrile gloves at all times while handling
the components.
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