D-8 The MassLynx Tune window
These conditions can also cause the pumps to be off:
• Anti-suck-back valves are closed (loss of compressed air supply).
• Pirani gauge trips.
• Pump has fails.
To adjust the Ion and Pirani gauge trip settings
1. In the Vacuum Control dialog box, enter the required value in the
appropriate Trip settings text box.
2. Click Return.
Alternative: Adjust the appropriate slider.
Fore Pumping readbacks
State Flag color Message Condition
Off Yellow Tripped Pump request off.
On Yellow Tripped Pump request on, pumping with the
pressure still above the trip level.
On Green Operational Pump request on, pressure below the
trip level.
Fine Pumping readbacks
Flag color Message Condition
Red Off Pump request off, pump cold.
Red Power Pump request on, pump power switched off.
Red Cooling Pump request off, pump hot.
Yellow Heating Pump request on, pump power switched on,
pump heating.
Red Cooling Trip Pump request on, cooling water failure.
Green Operational Pump request on, pump hot.
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