8 Glovebox or enclosure operation
Operating company’s process equipment
Page
8 - 18
MB-20-G/MB-200G-W_MB-LABmaster_MB-200 MOD_TP700
Operating Manual - V5.0 - 04/2018 - STD
Glovebox atmo-
sphere
External-purge func-
tion
For large-volume boxes/multibox sys-
tems and enclosures: accelerates
glovebox inertisation
Glovebox temperat-
ure
Box cooling RKI
80-200-300
Cooling of the box atmosphere
Cooling/Heating of
process materials
Refrigerator/Extern-
ally-mounted cooling
container
Cooling of process materials
Vacuum drying oven
VC20
Drying of process materials in a va-
cuum
Cooling of additional
equipment
Circulation cooler Cooling of process heat / additional
equipment in the box
Additional equip-
ment for processes
in the box
Spincoater Coating processes for semiconductors
processes
Evaporation sys-
tems
Evaporation of substances on a carrier
Multibox systems Allows operation with different pro-
cesses
8.11.2 Additional safety equipment
Over pressure safety
valve
Over pressure safety
Light barrier/curtain Secures hands against machine movements in the box/en-
closure
UV protection pane Protects process material against UV radiation
Box purge from ex-
ternal source
Ensures inert gas operation in case of circulation error
8.12 Operating company’s process equipment
Operator equipment, process materials and processes are only permitted if they adhere
to the intended use of the system.
► Refer to the sections Intended use [}3 - 1] and Improper use [}3 - 2].
► It is the operating company’s responsibility to determine the degree of risk of the ap-
plications and, if necessary to install and apply additional safety equipment and func-
tions in order to comply with applicable laws.
► If necessary, a specific standard operating manual must be created to address the
on-site conditions.
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