13 Spare parts
Antechamber
MB-20-G/MB-200G-W_MB-LABmaster_MB-200 MOD_TP700
Operating Manual - V5.0 - 04/2018 - STD
Page
13 - 11
13.6 Antechamber
13.6.1 Main antechamber, ∅ 390
Automatic antechamber cycles
No. Name Description Item no.
1 Vacuum Pirani sensor 0 … 1.000 mbar 3226006
2 T-fitting DN16 ISO-KF, alloy 3201024
T-fitting DN16 ISO-KF ,
stainless steel
3201050
3 Atmospheric pressure
sensor
-1000 … 636mbar,
1 … 10V,
4970007
3a Atmospheric pressure
sensor connection cable
M12, 5m 5008018
4 Magnetic valve 2/2-way, 0 -… 8bar (0
… 800kPa)
4600977
5 Angel valve MB-EPV-40, Al 9002531-K