2 Inert gas technology
Functional description
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2 - 22
MB-20-G/MB-200G-W_MB-LABmaster_MB-200 MOD_TP700
Operating Manual - V5.0 - 04/2018 - STD
4a Intervention by the automatic box pressure regulation: gas withdrawal is started
4b Intervention by the automatic box pressure regulation: gas inlet is started
2.3.6 Vacuum antechamber
Antechamber cycle
After material is moved from the outside to the inside of the antechamber, the antecham-
ber must be evacuated to deaerate the ambient air in the material. The evacuation is
stopped at a target vacuum level. The refill valve must then be opened to refill the ante-
chamber with working gas from the glovebox/enclosure either to an upper vacuum level
(if the process is Siemens PLC-controlled) or to nearly atmospheric pressure (if manually
controlled).
To obtain a highly pure atmosphere in the glovebox/enclosure, this process has to be re-
peated several times. Repeated evacuation and refilling increases the purity of the ante-
chamber atmosphere to approximately the level of the atmosphere.
Refer to figure above: transition from initial purity of the antechamber atmosphere (depic-
ted in red) to the target purity of the inert gas atmosphere in the glovebox/enclosure (de-
picted in green).
1 Atmospheric pressure ① Evacuate and refill cycle 1
2 Target vacuum of the antecham-
ber cycle process
② Evacuate and refill cycle 2
3 Pressure inside the glovebox/en-
closure
③ Evacuate and refill cycle 3
a
n
Evacuation cycle n p Internal antechamber pressure
b
n
Refill cycle n t Time
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