9 Antechamber operation (Vacuum antechamber)
PLC-controlled loading and unloading
MB-20-G/MB-200G-W_MB-LABmaster_MB-200 MOD_TP700
Operating Manual - V5.0 - 04/2018 - STD
Page
9 - 13
Start Screen ⇨ Antechamber icon ⇨ Parameter
Parameters for Siemens
PLC-controlled antecham-
ber operation
17
Optional: display of addi-
tional parameters "Lock
inner door after"
Parameter Explanation
Intermediate refilling level (Upper) vacuum threshold value for start-
ing intermediate refill
Setpoint vacuum leaktest Threshold value for vacuum leak test
Setpoint endvacuum Value for final vacuum
Pumping / refilling cycles Number of evacuation/refill cycles
Max. evacuation time Time limit, within which the value for "Set-
point vacuum leaktest" must be achieved.
In case of error, the cycle is stopped and
the "Time exceeded" message appears.
Max. leakrate Number defines the maximum decades,
the vacuum value is to increase for a
leakage test to be OK within the given
test time of 30 s
1
Lock inner door after If the antechamber is not used over
lengthy period of time the antechamber
atmosphere may no longer be pure.
Therefore, as an optional feature, the in-
ner door can be locked automatically by
the system after an adjustable delay time.
Before the inner door can be opened, a
full cycle must be completed.
2
1
Example: vacuum increases from 2 x10
-1
mbar to 4x10
-1
mbar (that is 2 steps). If this
is accurate, the process is stopped and the message “Antechamber leaks” is dis-
played.
17
For preset values refer to parameter table below in chapter Human machine interface
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