Brooks Marathon Express - Page 191

Brooks Automation 9. Maintenance and Repair
Part Number: 605914 Rev. B Repair Procedures
Procedure
Step Action
1.
a. Removeallhardwaresecuringthebezel.
b. Removethebezelandviewportassembly,takingcarenottoscratchtheviewport.
c. Theviewportmayhavebecomeadheredtotheo-ringsduetoheatingoftheTransport
Chamber.Carefullyremovetheviewportfromo-rings.
NOTE: Ifanyo-ringshavebecomeadheredtotheviewporttheymustbereplaced.
2.
Inspectallo-ringsforanyvisibledamagethatmayjeopardizevacuumintegrity.Replaceanyques-
tionableo-rings.Cleanorreplacetheo-ring,referto"O-RingRemoval/Replacement/Cleaning"on
page181.
3.
Cleantheviewportandtheareawheretheviewportwillbereplacedbyfollowingthe"CleaningPro-
cedure"onpage177.
4.
Insertthesealingo-ring.
5.
Inserttheviewport,takingcarenottoscratchit.
Copyright © 2023, Brooks Automation, Inc.
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