Brooks Automation 9. Maintenance and Repair
Part Number: 605914 Rev. B Repair Procedures
Lockout / Tagout
Workingwithenergizedequipmentmaycausesuddenmovementorelectricalshockand
mayresultindeathorseriousinjury.
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Allenergymustberemovedfromtheequipmentperthefacility’s
Lockout/Tagoutprocedurebeforeservicing.
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Iflocalproceduresarenotavailable,followtheprocedureforLockout/Tagoutin
OSHA Standard 29CFR 1910.147.
Procedure
Step Action
1.
a. Ensurethatallpower,communications,andairconnectionsareshutdownandthatthesystem
isventedtoatmosphericpressureasdetailedin"Shut-down"onpage1.
b. RemovetheLidLifter.Referto"LidLifterReplacement"onpage194.
c. Loosenthefourscrewssecuringthelidtothechamber.
d. Attachthreeliftingstrapsfromthehoisttothethreeeye-boltsonthelid.Thestrapsmustbe
appropriatelyratedandaminimumof914mm(3ft)long.
e. Removethelidfromthechamber,takingcarenottodamagethesealingsurfaceonthe
chamberoranyofthelidhardware.
2.
Removeallhardware(securingscrewsandsetscrews)fromtheoldlid.Ifnecessaryremovetheview-
portandthesensorreflectors,referto"Removing/ReplacingViewports"onpage189.
3.
Installthehardwareonthenewlid.
Copyright © 2023, Brooks Automation, Inc.
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