Brooks Marathon Express - Page 109

Brooks Automation 6. Operation
Part Number: 605914 Rev. B Station Coordinate System
seeFigure6-1.Anyintermodulestationsarenumberedonasecondclockwisecircuitofthe
TransportChamber.
TheR(radialextension),T(rotational),andZ(vertical)valuesforeachstationshouldberecorded
foreachtypeofmaterialthatwillbeusedwiththesystem.Notethatthesevalueswillbedifferentfor
differentsizematerialandfordifferentsystems.
WhentheZ-axisisbeingused,thereareanumberofuserdefinableparametersthatmustbe
providedforproperoperation.TheBaseTransferOffset(BTO)providesthedistancefromthe
robot’sHomepositiontothesystemsWaferTransferPlane(WTP).TheLowerparameterprovides
thedistancefromtheWTPthattherobotmustmovedowntodepositmaterial,whichalsodefines
theheightthattherobotmustenteramoduletopickupmaterial.
Figure 6-1: Station Assignment Examples
TheSlotparameterisusedtodefinethenumberofslotsinastation(thedefaultisone)andto
specifytheslottherobot’soperationwillbeperformedon(ifnoneisspecifiedthedefaultis
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