Brooks Marathon Express - Page 112

6. Operation Marathon Express
System Operation Overview Part Number: 605914 Rev. B
manuals.Thisoperationsectionprovidesuniqueinformationinrelationtothesecomponentsas
partofaMarathonExpresssystem.Inthecaseofanycontradiction,thismanualwilltake
precedence.
ThefollowingsequencedemonstratesthenormalmaterialtransferoperationoftheMarathon
Express.ThesequenceshownisforaMarathonExpress600systemwithtwoVCELoadLocks,
andtwoProcessModules.TheMXsystemchamberalsoprovidesanintegratedTopLignerVacuum
AlignerandTopCoolerforwaferalignmentandcooling.

UsingtheXFERcommandwithREwafersensorsetupcoulddamagethesystemorbreak
thewaferwhenpickorplacedtoinlinestationswiththesameThetacoordinatesandBTO.

Step Action
1.
Loadmaterialtobeprocessedintothesystem.
a. AwafercarrierisplacedinoneoftheVCELoadLocks.
b. ThehostcontrollerinitiatesapumpdownoftheLoadLock.
c. OncetheVCEisatthevacuumsetpointthehostcontrollerinitiatesamappingofthewafersin
thecarrierandretrievesthewafermapwhenitiscompleted.
2.
Pickwaferfromcarrierandalign.
a. ThehostcontrolleropenstheslotvalvetotheLoadLock.
b. ThehostcontrollerinstructstheMagnaTran7orLEAProbottoremoveawaferfromtheVCE
andplaceitontheTopLignerwithintheMXsystem.
c. ThehostcontrollerclosestheslotvalvetotheLoadLock.
3.
AlignwaferandplaceintotheProcessModule.
a. ThehostcontrolleropenstheslotvalvetotheLoadLock.
b. ThehostcontrollerinstructstheMagnaTran7orLEAProbottoremoveawaferfromtheVCE
andplaceitontheTopLignerandVXAlignerwithintheMXsystem.
c. ThehostcontrollerclosestheslotvalvetotheLoadLock.
d. ThehostcontrolleropenstheslotvalvestothefirstandsecondProcessModules.
e. ThehostcontrollerinstructstheMagnaTran7orLEAProbottotransferthewaferinthefirst
ProcessModuletothesecondProcessModule.
f. ThehostcontrollerclosestheslotvalvestothefirstandsecondProcessModules.
112
Copyright © 2023, Brooks Automation, Inc.