Brooks Marathon Express - Page 113

Brooks Automation 6. Operation
Part Number: 605914 Rev. B System Operation Overview
Step Action
4.
Picknextwaferfromcarrierandalign.Transferwafertonextprocessingstage.
a. ThehostcontrollerinstructstheTopLignertoorientthefiducialofthewaferandtheMagnaTran
7orLEAProbottopickthewaferfromthealigner.
Thealignermeasurestheeccentricityifrequiredandcommunicatesthepositionofthewaferto
thehostcontroller.ThehostcontrollermayinstructtheMagnaTran7robottocenterthewafer
ontheendeffectorifnecessaryduringthepick.
b. ThehostcontrolleropenstheslotvalvetothefirstProcessModule.
c. ThehostcontrollerinstructstheMagnaTran7orLEAProbottoplacethecenteredandoriented
waferintotheProcessModule.
d. ThehostcontrollerclosestheslotvalvetotheProcessModule.
5.
AlignwaferandplaceintotheProcessModule.TransferwaferfromProcessModuletocooler.
a. ThehostcontrollerinstructstheTopLignertoorientthefiducialofthewaferandtheMagnaTran
7robottopickthewaferfromthealigner.
Thealignermeasurestheeccentricityifrequiredandcommunicatesthepositionofthewaferto
thehostcontroller.(ThehostcontrollermayinstructtheMagnaTran7robottocenterthewafer
ontheendeffectorifnecessaryduringthepick.
b. ThehostcontrolleropenstheslotvalvetothefirstProcessModule.
c. ThehostcontrollerinstructstheMagnaTran7robottoplacethecenteredandorientedwafer
intothefirstProcessModule.
d. ThehostcontrollerclosestheslotvalvetothefirstProcessModule.
e. ThehostcontrolleropenstheslotvalvetothesecondProcessModule.
f. ThehostcontrollerinstructstheMagnaTran7robottotransferthewaferfromtheProcess
ModuletotheTopCooler.
g. ThehostcontrollerclosestheTopCoolerPoppetandstartsacoolcycle.
h. ThehostcontrollerclosestheslotvalvetotheProcessModule.
6.
Picknextwaferfromcarrierandalign.Transferwafertonextprocessingstage.
a. ThehostcontrolleropenstheslotvalvetotheLoadLock.
b. ThehostcontrollerinstructstheMagnaTran7robottoremoveawaferfromtheVCEandplace
itontheTopLignerwithintheMXsystem.
c. ThehostcontrollerclosestheslotvalvetotheLoadLock.
d. ThehostcontrolleropenstheslotvalvestothefirstandsecondProcessModules.
e. ThehostcontrollerinstructstheMagnaTran7robottotransferthewaferinthefirstProcess
ModuletothesecondProcessModule.
f. ThehostcontrollerclosestheslotvalvestothefirstandsecondProcessModules.
Copyright © 2023, Brooks Automation, Inc.
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