Brooks Marathon Express - Page 210

11. Field Replaceable Units Marathon Express
Marathon Express Part Number: 605914 Rev. B
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Figure 11-2: Sensor FRUs
Number Description
1
ASSY,HEATERW/CONN,1200W,
8"LONG,240V
ASSY,HEATERW/10"LCABLE,
750W,8"L
2
ASSY,TRANSPARENTWAFER
SENSOR,2.5MCABLE
3
ASSY,THERMOCOUPLEW/
PIGTAIL,6'
4
SWITCH,THERMAL,280DEGREE
F,QUICK-CONNECT
5
VALVE,RELIEF,1TO3PSIG,
PRESS
6
SWITCH,PRESSURE,FLANGE
SIZENW25
7
GAUGE,VACUUM,MICRO-ION,
RS-485,CE
-
GAUGE,VACUUM,MINI-CONVEC,
W/2SP&RS485,CE
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