Brooks Marathon Express - Page 211

Brooks Automation 11. Field Replaceable Units
Part Number: 605914 Rev. B Marathon Express
Figure 11-3: Facilities FRUs
Number Description
1 VALVE,TWOSTAGEANGLE,KF40
2 FILTER/DIFFUSER,KF50
3
VALVE,AIROPERATED,NC,
1/4"FACESEAL,F-F
4
KIT,ROUGHINGDUALLL,MX,
SINGLESTAGETC
5 ASSY,WATERFACILITIES
6
KIT,PNEUMATICAIR/EXHAUST,
MX
7
KIT,RETROFIT,VCRGASKET
ANDORIFICE,GX

Copyright © 2023, Brooks Automation, Inc.
211