Brooks Marathon Express - Page 23

Brooks Automation 1. Introduction
Part Number: 605914 Rev. B Specifications
Specification Value
Water
Facilitieschilledwatermustbesuppliedforcoolmodulesandsomepumps.
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Supply Pressure:50psignominal,70psigmaximum
30psigminimumdeltapbetweeninletandoutlet
40psigifequippedwithturbopumps(ormanufacturerslistedcoolingrequirements)
20psiminisrequiredtoavoidboilingchambercoolingwaterduringthesystemcartridge
heater120°Cbakeout
Flow Rate:15l/m(4gpm)
Filtration:200um(0.5mmFilterpre-installed)
Temperature:15°C±5°C(59°F±9°F)
Acidity:6.0to8.0Ph
Conductivity:2000μmhos/cm
Dissolved Solids:<75ppmascalciumcarbonate
Corrosion Inhibitor:300-600ppmnitriteborate,450-900ppmsodiumnitrite
Organics,IntermittentChlorinationorBiocideapplicationasrequired
Open Systems:basedonvisualinspection(DoNotusealgicidescontainingethyl
alcoholasitmaydegradeanysealsitcontacts)
Organics, Closed Systems:Standardfiltertestcount<100
Exhaust Sufficienttosupportreturnfromairlinesandexhaustfromvacuumpumps
WaterReturn Sufficienttohandlewaterflow.Nominal20psi,70psimax.
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Copyright © 2023, Brooks Automation, Inc.
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