SP3-XXX (Process)
D0CA/D0C9/D0C8/D0CB 3-162 SM Appendices
SP No. Large Category Small Category ENG
or
CTL
[Min to
Max/Init./Step]
3-600-00
1
Select ProCon Potential Control ENG
*
[0 to 1 / 1 / 1/step]
0: FIXED
1: CONTROL
3-600-00
2
Select ProCon LD Control ENG
*
[0 to 3 / 1 / 1/step]
0: OFF
1: ON
3-600-00
3
Select ProCon TC Adj. Mode ENG
*
[0 to 3 / 3 / 1/step]
0: Do Not Execute
1: 1st Power On
2: 1st Power On &
Job End
3: Dev gamma
judgment
3-600-00
4
Select ProCon ACC Before ProCon ENG
*
[0 to 3 / 2 / 1/step]
0: Not Execute
1: Process Control
2: TC Control
3-600-06
0
Select ProCon Vsg ITB Prev Pattern Corr. ENG
*
[0 to 2 / 2 / 1/step]
0: OFF
1: All Time
2: Non-use Time
(Long)
3-610-00
1
Charging AC Control:
Display
Standard Speed: Bk ENG
*
[0.00 to 3.00 / 2.10 /
0.01kV/step]
3-610-00
2
Charging AC Control:
Display
Standard Speed: C ENG
*
[0.00 to 3.00 / 2.10 /
0.01kV/step]
3-610-00
3
Charging AC Control:
Display
Standard Speed: M ENG
*
[0.00 to 3.00 / 2.10 /
0.01kV/step]
3-610-00
4
Charging AC Control:
Display
Standard Speed: Y ENG
*
[0.00 to 3.00 / 2.10 /
0.01kV/step]
3-611-00
1
Charging DC Control:
Display
Standard Speed: Bk ENG
*
[300 to 1000 / 700 /
1-V/step]
3-611-00
2
Charging DC Control:
Display
Standard Speed: C ENG
*
[300 to 1000 / 690 /
1-V/step]
3-611-00
3
Charging DC Control:
Display
Standard Speed: M ENG
*
[300 to 1000 / 690 /
1-V/step]