5. Operation sequence
57010
2/8
57010
Replenishment operation sequence [F]
1. Mixing Replenisher is performed.
2. PSR (Upper) Replenishment Solution Level Sensor is on.
• PSR (Upper) Replenishment Solution Level Sensor: ON
If PSR (Upper) Replenishment Solution Level Sensor is off
• ☞No. 00918[F] Replenish PSR.
3. P1R/P2RA/P2RB (lower) replenishment solution level sensors are off.
• P1R (Lower) Replenishment Solution Level Sensor: OFF
• P2RA (Lower) Replenishment Solution Level Sensor: OFF
• P2RB (Lower) Replenishment Solution Level Sensor: OFF
If P1R/P2RA/P2RB (lower) replenishment solution level sensors are on
• ☞No. 00913[F] Mixing Replenisher cannot be started.
4. The replenishment cartridge is set.
• Replenisher cartridge set sensor: on
If the replenishment cartridge is set
• Automatically goes to Step 5.
If the replenishment cartridge is not set
• ☞No. 00902[F] Install the replenisher cartridge.
5. The replenisher section door is closed.
• Interlock Switch (Replenisher Section Door): ON
If the replenisher section door is closed
• Automatically goes to Step 7.
If the replenisher section door is not closed
• ☞No. 00903[F] Close the replenisher section door.
P17
P2RAP1R
PSR
R
P
2R
P
3R
P
4
P2RB
R
P
1
SE63
SE64
SE65
SE66
SE67
SE68
LSE7
LSE8
Replenisher tank
G085081
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