SP3-XXX (Process) 
 
D0CA/D0C9/D0C8/D0CB  3-142  SM Appendices 
SP No.  Large Category  Small Category  ENG 
or 
CTL 
[Min to 
Max/Init./Step] 
0.0001%/step] 
3-251-10
3 
Dot Coverage: Display  Accumulate: Average: A: M  ENG
* 
[0.0000 to 100.0000 / 
5.0000 / 
0.0001%/step] 
3-251-10
4 
Dot Coverage: Display  Accumulate: Average: A: Y  ENG
* 
[0.0000 to 100.0000 / 
5.0000 / 
0.0001%/step] 
3-251-15
1 
Dot Coverage: Display  Accumulate: Average: Bk  ENG
* 
[0.00 to 100.00 / 0.00 
/ 0.01%/step] 
3-251-15
2 
Dot Coverage: Display  Accumulate: Average: C  ENG
* 
[0.00 to 100.00 / 0.00 
/ 0.01%/step] 
3-251-15
3 
Dot Coverage: Display  Accumulate: Average: M  ENG
* 
[0.00 to 100.00 / 0.00 
/ 0.01%/step] 
3-251-15
4 
Dot Coverage: Display  Accumulate: Average: Y  ENG
* 
[0.00 to 100.00 / 0.00 
/ 0.01%/step] 
3-252-00
1 
Accumulate Image 
Area: Display 
Latest: Bk  ENG
* 
[0 to 65535 / 0 / 
1cm^2/step] 
3-252-00
2 
Accumulate Image 
Area: Display 
Latest: C  ENG
* 
[0 to 65535 / 0 / 
1cm^2/step] 
3-252-00
3 
Accumulate Image 
Area: Display 
Latest: M  ENG
* 
[0 to 65535 / 0 / 
1cm^2/step] 
3-252-00
4 
Accumulate Image 
Area: Display 
Latest: Y  ENG
* 
[0 to 65535 / 0 / 
1cm^2/step] 
3-252-01
1 
Accumulate Image 
Area: Display 
Developer: Bk  ENG
* 
[0 to 4294967295 / 0 
/ 1cm2/step] 
3-252-01
2 
Accumulate Image 
Area: Display 
Developer: C  ENG
* 
[0 to 4294967295 / 0 
/ 1cm2/step] 
3-252-01
3 
Accumulate Image 
Area: Display 
Developer: M  ENG
* 
[0 to 4294967295 / 0 
/ 1cm2/step] 
3-252-01
4 
Accumulate Image 
Area: Display 
Developer: Y  ENG
* 
[0 to 4294967295 / 0 
/ 1cm2/step] 
3-260-00
1 
Temperature/Humidity: 
Display 
Temperature: Display  ENG  [-5.0 to 45.0 / 0.0 / 
0.1deg/step] 
3-260-00
2 
Temperature/Humidity: 
Display 
Relative Humidity: Display  ENG  [0.0 to 100.0 / 0.0 / 
0.1%RH/step] 
3-260-00 Temperature/Humidity:  Absolute Humidity: Display  ENG  [0.00 to 100.00 / 0.00