Keithley 4200-SCS User Manual

4200-900-01 Rev. K / February 2017 Return to Section Topics 3-99
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests
4. Select the Output Values to be exported to the subsite data sheet for interstressing
monitoring.
• To select output values, click the Output Values button in the ITM or UTM Definition tab.
• An Output Value is selected by clicking a checkbox to insert a √.
– For details, see the Reference manual, ITM Output Values, page 6-142 and
Reference manual, UTM Output Values, page 6-148.
5. If needed, Exit Conditions for an ITM can be set. When an exit condition other than None
is selected and the source for the ITM goes into compliance, the test, device plan, subsite
plan, site, or project will terminate. None is the default exit condition.
• To set the exit condition, click the Exit Conditions button in the Definition tab of the ITM.
– For details, see the Reference manual, ITM compliance exit conditions, page 6-141.
6. Save the project plan by selecting Save All from the File menu (at the top of the KITE
window). You can also save the project by clicking the Save All button on the toolbar.
7. Repeat steps 2 through 6 for adding more tests for the same device.
8. Repeat steps 1 through 7 for adding more devices to the subsite plan.
9. Configure the subsite for subsite cycling (stress / measure mode: In the project navigator,
double-click the subsite plan and select the Subsite Setup tab to configure subsite cycling.
a. Set the stress / measure mode cycle times for the subsite plan: The stress / measure
mode and cycle times are set from the Subsite Setup tab.
b. Configure the stress properties and connection information for every device in the
subsite plan: In the Subsite Setup tab, click the Device Stress Properties tab to open
the properties window.
For more information about subsite cycling, see Reference manual, Subsite
cycling, page 6-317.
Figure 3-79
Process flow: HCI/NBTI/constant current EM
Pre-stress
characterization
Fail?
No
Stop
Ye s
Record
data
Stress
Fail?
Fail/Exit?
Interim
test
Record
data
Increase
stress
time
Ye s
No
Ye s
No

Keithley 4200-SCS Specifications

General

Brand	Keithley
Model	4200-SCS
Category	Semiconductors
Language	English