4-16 Return to Section Topics 4200-900-01 Rev. K / February 2017
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual
Figure 4-21
Sample wafer organization
Prober control overview
A probe station, like any other external instrument, is controlled by the 4200-SCS through user
modules. Basic system connections are illustrated in Figure 4-1. A library of user modules, called
prbgen, is provided with the 4200-SCS to facilitate prober control. This generic prober user library,
developed and maintained by Keithley Instruments, allows KITE to control all supported probers in
the same manner. Therefore, KITE projects using
prbgen will work with any prober supported by
Keithley Instruments. Refer to Table 4-2 for the list of supported probers.
NOTE The information provided in this overview is a summary of the information provided in the
Reference Manual, Using a Probe Station, page G-1.
Subsite 1
112
Subsite 2
112
Subsites or Test
Element Groups
Site or Die
or Reticle
Final
Product
Die
Probe Pads