Keithley 4200-SCS User Manual

4200-900-01 Rev. K / February 2017 Return to Section Topics 4-21
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS
Probe station configuration
Before KITE can begin controlling a probe station, the probe station must be properly configured.
The probe station configuration includes:
1. Making test system measurement and communication connections.
2. Creating a probe list using the appropriate prober control software.
3. Loading and aligning the wafer.
Helpful configuration instructions for each supported prober are included in the Reference Manual,
Using a Probe Station, Appendix G. Refer to Tabl e 4 -2 for additional information. This tutorial uses
a manual probe station, however the probe station configuration is simple, because step 2 can be
omitted. To configure a manual probe station, connect the test system measurement signals to the
probe station as indicated in Figure 4-22, and align the prober to the first subsite (test element
group) in the test sequence.
Open the probesubsites project
Open the probesubsites project from the File menu on the KITE toolbar (click Open Project). The
project navigator for the probesubsites project is shown in Figure 4-28.
Figure 4-28
Project navigator

Keithley 4200-SCS Specifications

General

Brand	Keithley
Model	4200-SCS
Category	Semiconductors
Language	English