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4200-SCS
Keithley 4200-SCS User Manual
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4200-900-01 Rev. K / F
ebruary 2
017
Return to
Section T
opics
1-11
Model 4200-SCS User’s Manual
Section 1: Getting Started
Figure 1-8
Basic SMU source-meas
ure configuration
FORCE
SENSE
COMMON
V
-Source
I-Source
4200-SMU or 4210-SMU
4200-SMU or 4210-SMU
I-Measure
VI
Source
Control
I-Limit
(Compliance)
V
-Limit
(Compliance)
GUARD
100k
Ω
100k
Ω
Auto Sense
Resistors
SENSE
FORCE
Ground Unit
50k
Ω
COMMON
CHASSIS
32V
max
Removable
Ground Link
A
DUT
V
-MEASURE
V
SENSE LO
GUARD
SENSE
LO
20
22
Table of Contents
Table of Contents
7
Getting Started
11
Installation and System Connections
13
Inspection for Damage
13
Manuals
13
Repacking for Shipment
13
Shipment Contents
13
Unpacking the Model 4200-SCS
13
Environmental Considerations
14
Operating Environment
14
Shipping and Storage Environment
14
Line Power
15
Line Power Connection
15
Powering up the 4200-SCS
15
Connecting the Keyboard and Mouse
16
Line Frequency Setting
16
System Connections
16
Warm-Up Period
16
Connecting GPIB Instruments
17
Connecting a Probe Station
18
Connecting a LAN
19
Connecting a Printer
19
Model 4200-SCS Hardware Overview
20
Basic Characteristics
20
Basic SMU Circuit Configuration
20
DC Source-Measure Unit (SMU)
20
Models 4200-SMU and 4210-SMU Overview
20
SMU Terminals and Connectors
22
Basic Smu/Preamp Circuit Configuration
23
SMU with Model 4200-PA Overview
23
DC Preamp
24
Preamp Terminals and Connectors
24
FORCE Terminal
25
Multi-Frequency Capacitance / Voltage Unit (CVU)
26
Measurement Overview
26
Model 4210-CVU Card
26
Preamp CONTROL Connector
26
SENSE Terminal
26
Measurement Functions
27
DC Bias Function and Sweep Characteristics
28
Test Signal
28
Force-Measure Timing
30
Pulse Cards
30
Bias Function
30
Sweep Function
30
About the Pulse Cards
31
Firmware Upgrade for the 4200
32
Standard Pulse
32
Segment ARB Waveform
33
Full Arb
34
Pulse Card Settings
35
3-Port Power Divider
36
Rbt
36
Remote Bias Tee (RBT) and 3-Port Power Divider
36
Using an RBT and Power Divider
37
SCP2 (Oscilloscope)
38
Scope Card Settings
39
Basic Characteristics
42
Basic Circuit Configurations
42
Ground Unit (GNDU)
42
Ground Unit Connections
42
Ground Unit DUT Connections
43
FORCE Terminal
44
Ground Unit Terminals and Connectors
44
Chassis Ground
45
COMMON Terminal
45
SENSE Terminal
45
Connecting Duts
46
Test Fixtures
46
Testing with Less than ±20 V
46
Advanced Connections
47
Probers
47
Testing with more than ±20 V
47
How to Run a Basic Test
48
Boot the System and Log in
48
Open KITE
48
Locate and Run the Vds-ID Test Module
50
Test Definition
51
Run Vds-ID Test
52
View and Save the Sheet Data
52
View and Save the Graph Data
53
Firmware Upgrade
55
Accessing the Release Notes
56
Section 2 Model 4200-Scs Software Environment
57
Model 4200-SCS Software Environment
57
KITE Project Structure
59
KITE Interface
59
Graphical User Interface
60
Project Navigator
61
Project Defined
63
Project Components
63
Devices
63
Sites
63
Subsites
63
Tests
63
Understanding KITE
59
Itms Versus Utms
64
Defining an ITM
65
Defining a UTM
66
Using the UTM GUI View
67
How to Create Your Own Itms
69
Understanding the ITM Definition Tab
69
Understanding the ITM Forcing Functions
69
Understanding Dual Sweep
71
Understanding Pulse Mode
72
How to Use the Definition Tab to Configure ITM Parameters
73
Match the Physical and Virtual Connections
73
Configuring Forcing Functions for each Device Terminal
74
Basic Test Execution
77
Project Navigator Check Boxes
77
Configuring Pulse Mode
77
Device Plan
78
Initialization and Termination Steps
78
Project Plan
78
Subsite Plan
78
Tests (Itms and Utms)
78
Executing an Individual Test
79
Running the Test
79
Selecting a Test
79
How to Display and Manage Test Results
80
Data File Management
80
Using File and Test-Result Directories
80
Default User Director: C:\S4200\Kiuser
81
Devices Subdirectory
81
Understanding Device Libraries
82
How to Create and Add a New Device
83
Projects Subdirectory
84
Tests Subdirectory
85
System Directory: C:\S4200\Sys
87
Usrlib Subdirectory
87
How to Manage Numeric Test Results in Sheet Tab
88
Displaying and Analyzing Data Using Sheet Tab
88
Opening a Sheet Tab
88
Understanding and Using the Data Worksheet of a Sheet Tab
90
Understanding the Formula Box of the Data Worksheet
90
Understanding the Data-Source Identifier
91
Saving a Worksheet
92
How to Manage Graphical Test Results in the Graph Tab
94
Opening a Graph Tab
94
Accessing the Graph Tab Windows
95
Opening the Graph Settings Menu
95
Understanding the Graph Settings Menu
96
Defining Data to be Graphed
98
Understanding Table Columns in the Graph Definition Window
98
Opening and Using the Graph Definition Window
99
Understanding Buttons in the Graph Definition Window
99
KITE Library Management
101
Submitting Devices, Itms, and Utms to Libraries
101
Submitting Devices to a Library
101
Submitting Tests to a Library
104
Section 3 Common Device Characterization Tests
107
Common Device Characterization Tests
107
Default Project Overview
110
4- Terminal N-MOSFET Tests
111
Three Terminal NPN BJT Tests
112
Two Wire Resistor Test
113
Diode Tests
114
Connections
115
Leveraging the Default Project
116
Copying Entire KITE Project
116
Copying Individual Tests Using the Test Library Manager
117
Changing KITE Startup Behavior
118
How to Perform an I-V Test on My Device
110
KITE ITM Configuration
119
How to Perform a C-V Test on My Device
119
Definition Tab
119
Terminal Settings
119
Forcing Functions and Measure Options
122
Selecting the Forcing Function
122
Setting the DC Bias Conditions
123
Setting the AC Drive Conditions
123
Measure Settings
123
Test Conditions
124
Advanced Settings (Terminal Properties)
124
Status
126
Compensation
126
CVU ITM Examples
127
CVU Voltage Bias
127
CVU Voltage Sweep
128
CVU Voltage List Sweep
129
CVU Frequency Sweep (Bias)
130
CVU Frequency Sweep (Step)
132
Introduction (PIV-A and PIV-Q)
133
What Is Pulse IV
134
Why Use Pulse IV
134
Pulse IV for CMOS: 4200-PIV-A
135
Target Applications and Test Projects for PIV-A
135
What Is the PIV-A Pulseiv Package
135
How to Perform a Pulsed I-V Test on My Device
133
4200-PIV-A Test Connections
136
Supplied Interconnect Parts
136
Supplied Tools
137
Model 8101- PIV Test Fixture
138
Prober Interconnect
139
DC Prober Interconnect
140
RF Prober Interconnect
141
PIV-A Interconnect Assembly Procedure
141
Using the Pulseiv-Complete Project for the First Time
144
Running Autocalscope
145
Running Pulseivcal
145
Running Vds-ID DC ITM
146
Running Vds-ID-Pulse UTM
147
Running Vds-ID-Pulse-Vs-DC UTM
148
Running Vgs-ID DC ITM
149
Running Vgs-ID-Pulse UTM
149
Running Vgs-ID-Pulse-Vs-DC UTM
150
Running Scope-Shot
151
Adjustable Parameters in Scopeshot_Cal_Pulseiv
151
Tips for Using Pulse IV
152
Comparing DC and Pulse Results
153
Pulse IV UTM Descriptions
155
Cal_Pulseiv
156
Vdsid_Pulseiv
157
Vdid_Pulse_Dc_Family_Pulseiv
159
Vgsid_Pulseiv
163
Vgid_Dc_Pulse_Pulseiv
165
Scopeshot_Cal_Pulseiv
169
Scopeshot_Pulseiv
170
Scopeshot_Pulseiv_Demo
172
How to Perform a Quiescent-Point Pulsed I-V Test (PIV-Q) on My Device
172
Vdsid_Pulseiv_Demo
172
Vgsid_Pulseiv_Demo
172
Q-Point Pulse IV - Model 4200-PIV-Q
172
What Is the PIV-Q Package
173
Target Applications and Test Projects
173
Connecting Devices for Stress / Measure Cycling
174
Overview of the Cycling-Related Tabs
175
How to Perform Reliability (Stress-Measure) Tests on My Device
174
Configuring Subsite Cycling
175
Configuring the Subsite Setup Tab
176
Step A: Enable Cycling
176
Step B: Choose the Mode of Cycling
176
Step C1: Specify Cycle Timing; Linear, Log or List (Stress / Measure Mode Only)
176
Step C2: Specify Number of Cycles (Cycle Mode Only)
178
Step D: Set Periodic Test Intervals (Stress / Measure Mode, Log Timing Only)
178
Step E: Update and Save the Subsite Setup Configuration
179
Configuring Device Stress Properties
180
Setting AC Stress Properties
181
How to Perform AC Stress for Wafer Level Reliability (WLR)
184
Device Stress Properties Configuration Notes
187
Segment Stress / Measure Mode
191
Segment ARB Stressing
191
Segment ARB Stressing
192
Segment Stress / Measure Mode Configuration
193
Configure Stress Counts
193
Configure Device Stress Properties
195
Subsite Cycling Data Sheets
197
Multiple Subsite Cycling
197
Cycle Mode Data Sheet
197
Settings Window
200
Executing Subsite Cycling
197
Subsite Cycling Graphs
202
Cycle Mode
202
Index
202
Stress/Measure Mode
203
Configuration Sequence for Subsite Cycling
204
How to Perform a Flash Memory Test on My Device
206
Introduction
206
Theory of Operation
206
Programming and Erasing Flash Memory
206
Endurance Testing
212
Disturb Testing
213
Using a Switch Matrix
214
Pulse Waveforms for NVM Testing
215
Using Kpulse to Create and Export Segment ARB Waveforms
215
Flash Connections
221
Direct Connection to Single DUT
226
Direct Connection to Array DUT for Disturb Testing
227
Switch Matrix Connection to Array DUT
228
Memory Projects
230
Nvm_Examples
232
Flash-NAND Tests
232
Flash-NOR Tests
236
Flash-Switch Tests
236
Running the Flash-NAND, Flash-NOR or Flash-Switch Project
239
Running any Flash Project for the First Time
239
Running the Program or Erase UTM
240
Running the Fast-Program-Erase UTM
242
Running the Vt-Maxgm ITM
243
Running the Setupdc UTM
243
Running the Conpin-Pulse or Conpin-DC UTM (Switch Projects Only)
244
Flashendurance-NAND Tests
245
Flashendurance-NOR Tests
251
Flashendurance-Switch Tests
251
Running a Flashendurance or Flashdisturb Project
252
Running Endurance or Disturb Looping
254
Flashdisturb Tests
255
Explanation of Flash UTM Parameters
257
Error Codes
259
Troubleshooting
260
No Pulse Output
260
How to Perform Charge Pumping
261
Voltage Levels Do Not Match Expected Values
261
How to Perform a Charge Trapping Test
262
Slow Single Pulse Charge Trapping High K Gate Stack
262
Charge Trapping Procedure
263
Section 4 How to Control Other Instruments with the Model 4200-Scs
267
How to Control Other Instruments with the Model 4200-SCS
267
How to Control External Equipment
268
Controlling External Equipment Overview
268
Keithley Configuration Utility (KCON)
271
How to Control a Switch Matrix
273
KCON Setup
275
Open KITE and the Ivswitch Project
277
Running Test Sequences
278
The Connect Test
280
How to Control a Probe Station
281
Prober Control Overview
282
Test System Connections
284
KCON Setup
285
Probe Station Configuration
287
Open the Probesubsites Project
287
Open the Project Plan Window
288
Test Descriptions
288
Running the Test Sequence
291
Test Data
292
Running Individual Plans or Tests
293
How to Control an External Pulse Generator
293
Test System Connections
294
KCON Setup
294
Open the Ivpgswitch Project
297
Description of Tests
298
First ID-Vg Test
298
First Connect Test
298
Second Connect Test
299
Pgu1-Init Test
299
Pgu-Trigger Test
300
Pgu1-Setup Test
300
Second ID-Vg Test
300
Compare the Test Results
301
Running the Test Sequence
301
Overlaying Graphs
302
How to Control an External CV Analyzer
303
Connections
304
KCON Setup
304
Create a New Project
305
Add a Subsite Plan
306
Add a Device Plan
307
Add a UTM
308
Modifying the Cvsweep UTM
309
Executing the Test
309
What if My Equipment Is Not Listed in KCON
310
How to Generate Basic Pulses
312
Kpulse: Getting Started
312
Keithley Pulse Application (Kpulse)
312
Starting Kpulse
312
Kpulse Setup and Help
313
Triggering
313
Standard Pulse Waveforms
314
Segment ARB Waveforms
316
Exporting Segment ARB Waveform Files
318
Custom File Arb Waveforms (Full-Arb)
318
Waveform Types
322
Running the Test Sequence Test Data
329
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12 pages
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Keithley 4200-SCS Specifications
General
Brand
Keithley
Model
4200-SCS
Category
Semiconductors
Language
English
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