Keithley 4200-SCS User Manual

Model 4200-SCS User’s Manual Table of Contents
4200-900-01 Rev. K / February 2017 iii
Flash-NOR tests ................................................................................... 3-130
Flash-switch tests ................................................................................. 3-130
Running any Flash Project for the first time.......................................... 3-133
Running the Flash-NAND, Flash-NOR or Flash-Switch Project ........... 3-133
Running the Program or Erase UTM .................................................... 3-134
Running the Fast-Program-Erase UTM................................................ 3-136
Running the SetupDC UTM .................................................................. 3-137
Running the Vt-MaxGm ITM ................................................................. 3-137
Running the ConPin-Pulse or ConPin-DC UTM (Switch projects only) 3-138
FlashEndurance-NAND tests................................................................3-139
Running a FlashEndurance or FlashDisturb project ............................. 3-146
Running endurance or disturb looping.................................................. 3-148
FlashDisturb tests ................................................................................. 3-149
Explanation of flash UTM parameters .................................................. 3-151
Error codes ........................................................................................... 3-153
Troubleshooting .................................................................................... 3-154
How to perform Charge Pumping................................................................3-155
How to perform a Charge Trapping test...................................................... 3-156
Slow single pulse charge trapping high K gate stack ........................... 3-156
Charge trapping procedure................................................................... 3-157
4 How to Control Other Instruments with the Model 4200-SCS......... 4-1
How to control external equipment.................................................................. 4-2
Controlling external equipment overview.................................................. 4-2
Keithley Configuration Utility (KCON) ............................................................. 4-5
How to control a switch matrix ........................................................................ 4-7
KCON setup.............................................................................................. 4-9
Open KITE and the ivswitch project........................................................ 4-11
Running test sequences ......................................................................... 4-12
The connect test ..................................................................................... 4-14
How to control a probe station ...................................................................... 4-15
Prober control overview.......................................................................... 4-16
Test system connections......................................................................... 4-18
KCON setup............................................................................................ 4-19
Probe station configuration ..................................................................... 4-21
Open the probesubsites project.............................................................. 4-21
Open the project plan window ................................................................4-22
Test descriptions ..................................................................................... 4-22
Running the test sequence ..................................................................... 4-25
Test data ................................................................................................. 4-26
Running individual plans or tests ............................................................ 4-27
How to control an external pulse generator .................................................. 4-27
Test system connections......................................................................... 4-28
KCON setup............................................................................................ 4-28
Open the ivpgswitch project.................................................................... 4-31
Description of tests ................................................................................. 4-32
First id-vg test ......................................................................................... 4-32
pgu-trigger test........................................................................................ 4-34
Compare the test results......................................................................... 4-35
How to control an external CV analyzer........................................................ 4-37
Connections............................................................................................ 4-38
KCON setup............................................................................................ 4-38
Create a new project............................................................................... 4-39
Add a subsite plan .................................................................................. 4-40
Add a device plan ................................................................................... 4-41
Add a UTM.............................................................................................. 4-42
Modifying the cvsweep UTM................................................................... 4-43
Executing the test ................................................................................... 4-43
What if my equipment is not listed in KCON ................................................. 4-44
5 How to Generate Basic Pulses ............................................................... 5-1
KPulse: Getting started............................................................................. 5-2
Triggering.................................................................................................. 5-3
Standard pulse waveforms ....................................................................... 5-4
Segment ARB waveforms......................................................................... 5-6

Keithley 4200-SCS Specifications

General

Brand	Keithley
Model	4200-SCS
Category	Semiconductors
Language	English