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Keithley 4200-SCS User Manual

Keithley 4200-SCS
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3-92 Return to Section Topics 4200-900-01 Rev. K / February 2017
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual
Figure 3-73
Subsite Data sheet: Cycle Mode
Stress / Measure Mode data sheet
Figure 3-74 shows an example data sheet for a Subsite Plan that has one device.
Spreadsheet columns are explained as follows:
Column A Lists the cycles that were run. For the example in Figure 3-74, eight
cycles were run.
Column BLists the stress times (in seconds) for all cycles.
NOTE The stress for the first cycle is 0.0 seconds.
This is the no-stress cycle for HCI testing.
Column COutput Values: Lists the measured readings for the first Output Value
(IDOFF reading for the ID#1 test).
Column DStarting with Cycle 2, lists the % Change between each post-stress
IDOFF reading and the pre-stress IDOFF reading (Cycle 1). The %
Change for an Output Value is calculated as follows:
291.1666E-15
293.2366E-15
290.9966E-15
289.1465E-15
1
2
3
4
2.2350E-3
2.2360E-3
2.1390E-3
2.2325E-3
2.9236E-3
2.9259E-3
2.9186E-3
2.9200E-3
4.8939E-12
4.8436E-12
4.8989E-12
4.8900E-12
Output Value readings
from test named Id
Output Value readings
from test named IgLeak
The above subsite data is for device 4terminal-n-fet. For a multi-device Subsite Plan, there would
be a separate tab for each device.
The data for other devices are displayed by clicking the corresponding tab.
Clicking this tab displays the Calc sheet.
It is the same as the Calc sheet for an ITM and UTM.
Clicking this tab displays information about the subsite cycling
setup, including Output Values. See Figure 3-75 for details.

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Keithley 4200-SCS Specifications

General IconGeneral
BrandKeithley
Model4200-SCS
CategorySemiconductors
LanguageEnglish