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Keithley 4200-SCS User Manual

Keithley 4200-SCS
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4200-900-01 Rev. K / February 2017 Return to Section Topics 3-103
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests
The flash projects support two methods for performing the switching between the
pulse and measure phases of the typical flash memory test.
The first is the typical method, using a switch matrix to route the pulse or DC
signals to the DUT (see Figure 3-84). Using the switch matrix is more
complicated, but provides flexibility for certain tests and test structures that use
arrays. The second method uses the on-card isolation relays on both the SMUs
and the Keithley pulse card to configure a simpler setup without the external
switch matrix (see Figure 3-85).
Because both the SMUs and the Keithley pulse card have isolation relays located
on the cards, it is possible to configure a simpler setup without the external switch
matrix (see Figure 3-85 and Figure 3-89). The advantage of the simpler setup is
lower cost, while the switch matrix approach provides lower current measurement
performance and flexibility necessary for testing arrays of test structures.
NOTE For the 4225-PMU, the Reference manual, PMU-Flash-NAND project, page 16-118
uses the output relays of the instrument cards to switch the SMU and PMU outputs to
the device terminals (see Figure 16-125).
To determine the state of the device, one would perform a Vg-Id sweep, then
perform a calculation to find the voltage threshold, V
T
. The shift in V
T
represents a
change in the amount of charge stored in the floating gate, which indicates the
state of the cell, from fully programmed (1) to fully erased (0). The 4200-SCS
FLASH package does not include the ability to measure the pulse waveform or
pulse response.

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Keithley 4200-SCS Specifications

General IconGeneral
BrandKeithley
Model4200-SCS
CategorySemiconductors
LanguageEnglish