7. SPECIAL ADJUSTMENT FUNCTIONS
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7.4 Compliance with SEMI-F47 standard
The control circuit power supply of the the driver can comply with SEMI-F47
standard. However, a back-up capacitor may be necessary for instantaneous
power failure in the main circuit power supply depending on the power supply
impedance and operating situation.
Use a 3-phase for the input power supply of the driver. Using a 1-phase 100 V
AC/200 V AC for the input power supply will not comply with SEMI-F47 standard.
Be sure to perform actual machine tests and detail checks for power supply
instantaneous power failure of SEMI-F47 standard with your equipment.
The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag
immunity test" of LECSB2-T
□
series.
(1) Parameter setting
Setting [Pr. PA20] and [Pr. PF25] as follows will enable SEMI-F47.
Set the time [ms] of the [AL. 10.1 Voltage drop in the control circuit power]
occurrence.
Enabling SEMI-F47 will change operation as follows.
(a) The voltage will drop in the control circuit power at "Rated voltage × 50% or less". After 200 ms, [AL.
10.1 Voltage drop in the control circuit power] will occur.
(b) [AL. 10.2 Voltage drop in the main circuit power] will occur when bus voltage is as follows.
Table 7.1 Voltages which trigger [AL. 10.2 Voltage drop in the main circuit power]
Bus voltage which triggers alarm
(c) MBR (Electromagnetic brake interlock) will turn off when [AL. 10.1 Voltage drop in the control
circuit power] occurs.
(2) Requirements and recommended conditions of SEMI-F47 standard
Table 7.1 shows the permissible time of instantaneous power failure for instantaneous power failure
of SEMI-F47 standard.
Table 7.2 Requirements conditions of SEMI-F47 standard
Instantaneous power
failure voltage
Permissible time of
instantaneous power
failure [s]
(3) Calculation of tolerance against instantaneous power failure
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