- 4 -
7.3.2 Instantaneous power failure tough drive function ....................................................................... 7-28
7.4 Compliance with SEMI-F47 standard ................................................................................................ 7-32
7.5 Model adaptive control disabled ........................................................................................................ 7-34
7.6 Lost motion compensation function .................................................................................................. 7-35
7.7 Super trace control ............................................................................................................................ 7-38
8. TROUBLESHOOTING 8- 1 to 8- 80
8. TROUBLESHOOTING .......................................................................................................................... 8-2
8.1 Explanation for the lists ....................................................................................................................... 8-2
8.2 Alarm list ............................................................................................................................................. 8-3
8.3 Warning list ....................................................................................................................................... 8-12
8.4 Remedies for alarms ......................................................................................................................... 8-15
8.5 Remedies for warnings ..................................................................................................................... 8-56
8.6 Trouble which does not trigger alarm/warning .................................................................................. 8-72
9. OUTLINE DRAWINGS 9- 1 to 9-5
9.1 Driver ................................................................................................................................................. 9- 2
9.2 Connector.......................................................................................................................................... 9- 5
10. CHARACTERISTICS 10- 1 to 10-7
10. CHARACTERISTICS ........................................................................................................................ 10-2
10.1 Overload protection characteristics ................................................................................................. 10-2
10.2 Power supply capacity and generated loss ..................................................................................... 10-3
10.3 Dynamic lock characteristics ........................................................................................................... 10-5
10.3.1 Dynamic lock operation ............................................................................................................ 10-5
10.3.2 Permissible load to motor inertia when the dynamic lock is used ............................................ 10-6
10.4 Cable bending life ............................................................................................................................ 10-7
10.5 Inrush currents at power-on of main circuit and control circuit ........................................................ 10-7
11. OPTIONS AND PERIPHERAL EQUIPMENT 11- 1 to 11-33
11. OPTIONS AND PERIPHERAL EQUIPMENT ................................................................................... 11-2
11.1 Cable/connector sets ...................................................................................................................... 11-2
11.1.1 Combinations of cable/connector sets ..................................................................................... 11-3
11.1.2 STO cable ................................................................................................................................. 11-6
11.1.3 Encoder cable/connector sets .................................................................................................. 11-7
11.1.4 Motor cables ............................................................................................................................. 11-9
11.1.5 Lock cables ............................................................................................................................. 11-10
11.2 Regenerative options .................................................................................................................... 11-11
11.2.1 Combination and regenerative power ..................................................................................... 11-11
11.2.2 Parameter setting ................................................................................................................... 11-11
11.2.3 Selection of regenerative option ............................................................................................. 11-12
11.2.4 Dimensions ............................................................................................................................. 11-13
11.3 Setup software (MR Configurator2TM) ......................................................................................... 11-14
11.3.1 Specifications ......................................................................................................................... 11-14
11.3.2 System configuration .............................................................................................................. 11-15
11.3.3 Precautions for using USB communication function .............................................................. 11-16
11.4 Battery (LEC-MR-BAT6V1SET) .................................................................................................... 11-17
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