Strasbaugh nTellect 7AF - Page 100

Strasbaugh nTellect (Model 7AF) Wafer Grinder
4 - 2 Version 1.2 - June 2004
MECHANICAL DESCRIPTION
Overview 3
Grinding Area 3
Bridge Assembly 3
Spindle Assemblies 4
Coarse/Fine Spindles 4
Left/Right Work Chucks 5
Air Bearing Spindles 5
Left/Right Digital Measurement Probes 6
Left/Right Conditioning Arms 6
Wafer Handling Area 7
Robot 7
Pre-Aligner 8
Spin-Rinse Station 9
Send 1, Send 2, Receive 1, Receive 2 Cassette Access Turret Assemblies 9