xxfsassy.p c+ 15.3.9 Field Service Assy BOM Date: 08/09/01
Page: 231 Strasbaugh Time: 11:57:36
Parent: 224034 7AF,VACUUM,CHUCK 8" POROUS RHS >
Drawing: 7AF-224034 Rev:
Type: ASSY-SUB Group: 400
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
102537 1.00 EA CERAMIC,8"DIA.X3/4 CER MIC FERRO CS-MISC
218640 1.00 EA 7AF,WORKCHUCK,BACKING PLATE 8"(P FAB-MISC 7AF-218640
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